Technology for Surface Measurement & Analysis
Combining Scientific Rigor with Practical Usability — with Industry-Leading Results
Bruker provides advanced tools for surface and materials characterization across semiconductor, materials science, life science, and industrial applications. Our portfolio includes atomic force microscopes (AFMs), nanoIR spectrometers, stylus and optical profilometers, ellipsometry and reflectometry systems, in-situ and stand-alone nanomechanical testers, mechanical and tribological testers, and a comprehensive suite of semiconductor research and manufacturing tools.
Our instruments support a wide range of R&D, QA/QC, process monitoring, materials development, and other materials analysis needs — from early-stage research to high-throughput production. They’re designed for precision and usability, delivering highly accurate, reliable data in even the most challenging environments.
Whatever your measurement or experimental requirements, whatever your material or scale, Bruker offers a high-performance solution to meet your needs. Explore our product catalog, learn more about what makes our technology unique, or get expert selection guidance to find the best solution for you.
Explore nanoscale surface features with precision and versatility
AFMS FOR MATERIALS
- DIMENSION FASTSCAN AFM - Fastest commercial AFM, designed to scan fast without losing measurement quality
- DIMENSION ICON AFM - Bruker’s flagship AFM, trusted for its unmatched application flexibility and resolution
- DIMENSION NEXUS AFM - High-end performance at lower cost of ownership -- for flexibility without compromise
- DIMENSION XR - Turnkey large-sample AFMs for nanomechanical, nanoelectrical, and electrochemical applications
- INNOVA AFM - Versatile, easy-to-use, research-grade AFM with support for beginner, academic, or multi-user labs
- INNOVA-IRIS AFM - AFM-TERS platform for correlated topographic, thermal, electrical, and mechanical mapping
- MULTIMODE 8-HR - Extendable high-resolution AFM, with open-access flexibility and a wide range of accessories
- NANOWIZARD 4XP NANOSCIENCE - High-performance AFM with modular accessories for diverse experiments
- NANOWIZARD NANOOPTICS - Seamless integration with advanced setups for correlative optical-AFM experiments
- NANOWIZARD V NANOSCIENCE - Automated quantitative imaging and fastest scanning of rough surfaces
AFMS FOR INDUSTRY
BIOAFMS FOR LIFE SCIENCES
- CELLHESION 300 - Specialized for cell-cell, cell-tissue, cell-substrate interactions with single-molecule sensitivity
- CELLWIZARD STAGE - Automated, AI-guided, multi-chamber stage for in vitro imaging and nanomechanical analysis
- DIMENSION FASTSCAN BIO - Fast scanning for large samples in dynamic biological studies
- FORCEROBOT 400 - Automated force spectroscope for single molecule application
- NANORACER - High-speed BioAFM for real-time visualization of dynamic biological processes
- NANOWIZARD 4XP BIOSCIENCE - High-performance, user-friendly BioAFM for diverse life science/soft matter apps
- NANOWIZARD V BIOSCIENCE - Automated quantitative imaging for long-term, self-regulating experiments
- NANOWIZARD PURE - Streamlined, modular BioAFM ideal for interdisciplinary research facilities & collaborative labs
- ULTRA SPEED 3 - Fast automated imaging and integration into optical microscopy and super-resolution techniques
Measure and inspect surface topography with speed, accuracy, and flexibility
3D Optical Profilers & Stylus Profilometers
Non-contact and contact surface roughness characterization, step height measurements, and film stress analyses
BENCHOP OPTICAL PROFILERS
- CONTOURX-100 - Industry-leading entry-level profiler for routine surface measurements and budget-conscious labs
- CONTOURX-200 - Flexible optical profilometer with X/Y/Z automation, stitching, and advanced find surface
- CONTOURX-500 - Fully automated and built to deliver top-tier advanced surface metrology in a compact format
FLOORSTANDING OPTICAL PROFILERS
- CONTOURX-1000 - High-end, fully automated profiler for demanding research and industrial metrology applications
- NPFLEX-1000 - Large-sample precision manufacturing solution for fast, automated roughness/texture measuring
- CONTOURSP - Large-panel metrology system for high-volume, high-precision PCB production control
- HD9800+ - Large-format surface profiling system for the data storage industry
STYLUS PROFILOMETERS
Measure mechanical and tribological properties across scales
STAND-ALONE NANOMECHANICAL TEST SYSTEMS
- HYSITRON TI 990 - Advanced, high-precision system with the most measurement modes for a broad range of labs
- HYSITRON TI 980 - Versatile nanomechanical/nanotribological test system for advanced material characterization
- HYSITRON TI PREMIER II - Compact and cost-effective, for precise testing on a wide range of materials
- HYSITRON TS 77 SELECT - Entry-level core nanoindentation capabilities, ideal for academic labs and routine testing
NANOMECHANICAL INSTRUMENTS FOR MICROSCOPES
- HYSITRON BIOSOFT - Portable, multiscale testing of biological/soft matter on inverted optical microscopes
- HYSITRON INTRASPECT 90 - Nanoindentation system for Raman microscopes
- HYSITRON INTRASPECT 360 - In-situ mechanical characterization for X-Ray microscopes and synchrotron beamlines
- HYSITRON TS 75 - Enables quantitative, rigid-probe nanoindentation and nanotribology on Bruker AFMs
NANOMECHANICAL INSTRUMENTS FOR SEM/TEM
- HYSITRON PI ENVISION SEM PICOINDENTER - Fully-automated, high-speed correlative imaging
- HYSITRON PI 80 SEM PICOINDENTER - Core in-situ nanomechanical instrument for SEMs
- HYSITRON PI 89 SEM PICOINDENTER - Modular in-situ instrument for simultaneous imaging and mechanical testing
- HYSITRON PI 89 AUTO - PI 89 with automated co-localized imaging for high-throughput in-situ nanoindentation
- HYSITRON PI 95 TEM PICOINDENTER - Depth-sensing indenter for direct-observation testing in a TEM
TRIBOMETERS/MECHANICAL TEST SYSTEMS
Correlate chemical composition with nanoscale structure
NANOSCALE INFRARED SPECTROMETERS
- DIMENSION ICONIR - Flagship system offering ultimate versatility for materials research and industrial R&D
- DIMENSION ICONIR300 - Variation of the IconIR for semi R&D, failure analysis, and nanocontaminant identification
- NANOIR3 - Streamlined solution for routine photothermal AFM-IR on small samples
- NANOIR3-S - Enhanced version of the nanoIR3 with added s-SNOM nanoscale electrical and optical characterization
Characterize film thickness and optical properties on advanced films
FLOOR-STANDING/ROBOTIC SYSTEMS
- FILMTEK 6000 PAR-SE ROBOTIC - Advanced front-end measurements of ultra-thin to thick multi-layer films
- FILMTEK 2000M TSV ROBOTIC - Optimized for front-end and advanced packaging applications
- FILMTEK 4000 ROBOTIC - Refractive index and film thickness measurements for silicon photonics and waveguide
- FILMTEK 2000 PAR-SE ROBOTIC - Automated inline measurement of patterned thin-film and multilayer film stacks
BENCHTOP SYSTEMS
- FILMTEK 2000 PAR-SE - Sensitive, accurate characterization of thin and multi-layer films on patterned wafers
- FILMTEK 2000M - Film thickness measurements of thin to very thick films on micron-sized device features
- FILMTEK 4000 - Refractive index and film thickness measurements for silicon photonics and waveguide applications
- FILMTEK 2000 SE - Advanced thin film and multi-layer mapping on unpatterned films
- FILMTEK SE - Single point measurements for easy, accurate thin film characterization in diverse applications
- FILMTEK 2000 - For mapping unpatterned thin films, with optional capability for films on transparent substrates
Quantify surface dimensions and profiles
AUTOMATED AFM
Assess and improve semiconductor devices and manufacturing processes
AUTOMATED AFM
CRYOGENIC DRY CLEANING
CURRENT IN-PLANE TUNNELING
ELLIPSOMETRY & REFLECTOMETRY SYSTEMS
- FILMTEK 6000 PAR-SE ROBOTIC - Advanced front-end measurements of ultra-thin to thick multi-layer film stacks
- FILMTEK 2000M TSV ROBOTIC - Optimized for front-end and advanced packaging applications
- FILMTEK 4000 ROBOTIC - Refractive index and film thickness measurements for silicon photonics and waveguide
- FILMTEK 2000 PAR-SE ROBOTIC - Automated inline measurement of patterned thin-film and multilayer film stacks
NANOMECHANICAL METROLOGY
PHOTOMASK REPAIR
STYLUS PROFILOMETRY
WHITE LIGHT INTERFEROMETER
X-RAY DEFECT INSPECTION
X-RAY METROLOGY FOR COMPOUND SEMI
- QCVELOX-HR - Fully automated, high-throughput, precise HRXRD and XRR metrology of complex epilayer structures
- QC5-R - Manual loading system for precision HRXRD and XRR metrology of complex epilayer structures
- DELTA-X - Fully automated X-ray metrology for a variety of semiconductor thin film applications
- QC3 - High-resolution X-ray diffraction system for epilayers
- QCVELOX-E - Optimum HRXRD performance for epilayer monitoring
X-RAY METROLOGY FOR SILICON SEMI
- SIRIUS-FW - Fully automated µXRF metrology platform to monitor bump composition and under bump metallization
- SIRIUS-RF - Automated, latest generation µXRF & XRR metrology system to monitor films on full wafers
- 7300LSI - Automated x-ray diffractometer for R&D and fab production monitoring on full wafers
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.