fp-III

High-Speed and Precision Mask Repair Capability

The fp-III^® Femto-Pulse Laser System is the newest addition to Bruker’s highly successful family of Photomask repair tools. With its extraordinary high-speed and precision mask repair capability, the fp-III is today’s most cost effective solution to replace obsolete, older, slower and less capable existing laser and FIB mask repair systems. The fp-III is designed for volume production mask repairs down to the 45nm technology node, including large and small area image reconstruction and through pellicle repairs.

Broad Range

of laser ablation & particle removable materials

Including chrome, MoSi, opaque MoSi, SiN, quartz, EUV, foreign materials, and persistent unknown particles

Precise

Edge Placement

≤ 20 nm (± from target) of all materials

Extraordinary accuracy control permits repairs to be specifically matched to the specified reference or differentially biased at the line edges

Iterative Repair

Capability

with femto-pulse laser

Assures no absorber or quartz damage, no heat damage, no splash or roll-up

All Mask

Types

45nm node repair

With the capability to remove unknown particles from EUV masks

Features

Ultimate Control of Mask Repair Made Easy

Our Fempto-Pulse laser repair processes are fully controllable by shape, power, and number of pulses; independent of material composition, material interfaces or the geometry being removed.

Additionally, the integrated local pattern copy functions are standard on the system for easy setup and repeatable results.

Designed for Best Performance

The fp-III comes standard with both reflected and transission imaging to provide the best possible AIMS transmission performance.

Offering superior through-pellicle repair and particle removal capability of persistent unknown particle contamination, even over large areas.

Lots of Capability with None of the Worries

Bruker's mask repair fp-III delivers production-proven, high-speed repairs with:

no vacuum requirement
no chemistries
no chemical residues
no beam related charging effects
no need for constant drift correction using undesirable positioning markers

Support

How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

Find Bruker Support Near You

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