The QC3 offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements, and data analysis. Data analysis can be performed automatically, or offline using our popular RADS software. The sample stage has a full 300mm of travel, allowing for measurements of large wafers, or several smaller wafers simultaneously. An optional robot handler is available for automated loading and measurement from cassette. It is the ideal tool for routine analysis of semiconductor substrates, epilayer structures and processed device wafers for all compound semiconductor materials.