ZetaQuant is the latest addition to the list of quantification methods for electron transparent samples supported by ESPRIT. It works in TEM, STEM and SEM and relies on the knowledge of the beam current used for measurement to provide accurate results:
- Standard based quantification and thickness determination using experimentally calibrated Zeta factors
- Requires the possibility to measure the beam current
- The exact thickness of the standard must be known or a respective measurement option (e.g. by EELS) has to be available
