Since its launch in 2015, OPTIMUSTM TKD is the only commercial solution enabling on-axis TKD in the SEM and it has positioned itself as the leading TKD solution due its capabilities.
Low probe current requirements - OPTIMUSTM TKD enables orientation and phase mapping with nanometer scale spatial resolution at hundreds of points per second using not more than 2nA probe current and with excellent data integrity or indexing quality.
Spatial resolution - With a spatial resolution of at least 2 nm (when using a high-end FE-SEM), OPTIMUSTM TKD reveals in high detail features smaller than 10 nm and sometimes features even smaller than 5 nm (see application examples below).
Easy to use
OPTIMUS™ TKD detector head can be used interchangeably with the standard detector head on all Bruker e-Flash EBSD detectors, giving easy access to both EBSD and TKD using the same detector. Depending on the measurement requirements e.g. spatial resolution, trained users can switch between TKD and EBSD analysis in 10-15 minutes. OPTIMUSTM TKD works perfectly in combination with our patented TKD sample holder (EP 2824448 A1).
Raw/unprocessed orientation map from a 20 nm Au film (left) and zoomed-in area containing annealing twins ~4 nm wide. Important parameters: 30 kV EHT, 2 nA probe current, 1.5 nm steps, 11.5% zero solutions, 320 fps speed, 6:31min measurement time. Sample is courtesy of Alice Da Silva Fanta from DTU Nanolab in Copenhagen, Denmark.