Micro-XRF on SEM

Rapid Stage

High-speed Elemental Mapping with Micro-XRF on SEM

Rapid Stage is a modular piezo-based stage designed to be mounted on top of standard SEM stages to enable high-speed mapping over large areas. This unique stage concept includes a stage adaptation for the specific microscope and a sample holder. It is controlled independently from the SEM stage and can operate up to a maximum travel speed of 4 mm/s.

Key facts and benefits

  • Most effective for large area maps
  • Uses the high sensitivity of XRF to pick up low levels of trace elements in samples (e.g. grain mounts, rock slabs, thin sections, etc.) in a short time
  • Can be used simultaneously with e-beam excitation (for low energy elements)
  • Can scan samples of up to 50 mm directly and samples > 50 mm in combination with the SEM stage
  • Works in VP/LV mode
  • Seamless integration in Bruker ESPRIT 2.2 software suite
  • Works for all modes of operation (point, line scan, mapping)
  • Can be adapted to most common SEM stages
  • Every Rapid Stage comes with a SEM stage adapter (dovetail) and sample holder
  • Quick stage change (can be easily removed when not needed)




Download the Rapid Stage brochure (PDF)