Widest Range of Measurement Types
From our exclusive PeakForce Tapping modes to traditional AFM modes, Dimension HPI systems provide the greatest range and flexibility to meet your specific measurement and characterization needs on a wide range of samples
Highest Accuracy Roughness, Depth, and Height Measurements
Dimension HPI provides highly repeatable and accurate roughness, height, and depth measurements, from sub-nanometer steps to high aspect ratio trenches using PeakForce Tapping with Bruker exclusive high tip-lifetime probes.
Most Comprehensive Defect Review Characterization
Nanoscale defects can be located and characterized on a variety of wafers, substrates, and sliders. PeakForce QNM® can uniquely provide combined 3D imaging and mechanical property information.
Fast Nanoelectrical Measurements
FastScan technology with Conductive-AFM (CAFM) can perform nanoscale current measurements at high scan rates, significantly increasing the efficiency of failure analysis measurements. Using a small magnetic force microscopy (MFM) cantilever, FastScan HPI and PRO provide greater than 10x scan rate improvements for MFM applications with exceptional data quality using PeakForce Tapping. PeakForce KPFM™ provides the highest spatial resolution and most accurate measurements of surface potential. PeakForce TUNA™ provides the most sensitive conductivity measurements.
Precise Nanoscale Mechanical Mapping
Bruker’s unique PeakForce QNM and FastForce Volume™ nanoscale mechanical mapping modes can precisely map mechanical properties—modulus, stiffness, adhesion, dissipation, and deformation— while simultaneously imaging sample topography and electrical properties. PeakForce QNM enables non-destructive measurements on polymers, thin films, and nanoscale defects not measurable by transmission electron or scanning electron microcopy techniques.
