5nm Production Photomask Repair
Bruker’s AFM nanomachining systems are the global standard and preferred production technique for precision repair of advanced, critical-level photomasks. The nm-VI® system is Bruker’s sixth generation AFM-Guided Nanomachine. The nm-VI sets Bruker apart as the company that can develop and deliver the innovative nano-scale material shaping processes required to keep the semiconductor industry in concert with the 5 nanometer technology node and beyond.
Nanomachining is a unique defect repair technique in the semiconductor industry, combining the positional control of an AFM and proprietary Nanomachining hardware and software to perform material removal at nanometer levels.
Its appeal lies in the precise and accurate removal of defects of various materials including chrome, MoSi, opaque MoSi, silicon nitride, quartz, EUV, foreign materials, and unknown particles. Its iterative repair capability and planar material removal guarantees repaired areas with a much wider “Through Focus” transmission window.
With six generations and nearly 20 years of inline experience, Bruker's AFM-guided nanomachine boasts unique optimizations and enhancements to control pattern defects in the production of high-end photomasks with decreasing feature size and increasing mask complexity. Notable features include:
The nm-VI offers production proven nanomachining with few downsides. The AFM-based nanomachining technique boasts the following over other (focused ion beam (FIB) and laser or electron beam) mask repair systems.
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.