EDS Analysis Using Ultra-Low Beam Currents

EDS Analysis Using Ultra-Low Beam Currents

This webinar took place on July 15th 2016

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As silicon drift detectors (SDDs) have become the standard detectors for energy dispersive X-ray spectrometry (EDS), special detector designs can take the analysis performance to the next level. The FlatQUAD detector XFlash® 5060FQ features four separate SDDs integrated onto one chip providing maximum solid angle, highest count rates, and lowest pile-up and dead time.

The annular detector XFlash® 5060FQ can be placed between pole piece and sample in a standard SEM using a BSE detector like setup. The detector has a hole in the center for the primary beam. Therefore the four SDDs are centered around the scanning electron beam path, covering a very large solid angle of more than 1 sr which is typically 100 times larger than the solid angle of a 10 mm² detector in a conventional setup. Therefore, extremely high count rates can be easily achieved even with low probe currents, and can be processed with four separate electronic channels in parallel, leading to a maximum output count rate of more than 1,600,000 cps.

In this webinar, you will learn more about design and concept of the annular FlatQUAD detector XFlash® 5060FQ and his advantages which will be demonstrated on different geological and biological samples. The webinar will be rounded off by a 15-minute Q&A session where our experts will answer your questions. 

Why should you attend?

  • Expand your knowledge in EDS analysis
  • Learn more about the advantages of the annular four-channel SD detector for EDS
  • Discuss your own applications with experts


Max Patzschke
Max Patzschke
Application Scientist, Bruker Nano Analytics
Andi Kaeppel
Senior Product Manager EDS/SEM, Bruker Nano Analytics