February 22 - 26 | San Jose Convention Center | San Jose, CA

Bruker at SPIE Advanced Lithography + Patterning 2026

Visit Bruker at SPIE Advanced Lithography + Patterning 2026

Come visit us in Booth 608!

February 22 - 26 | San Jose Convention Center | San Jose, CA

Meet us in San Jose for the SPIE Advanced Lithography + Patterning, where we’ll be showcasing our comprehensive suite of specialized semiconductor technologies. Our solutions include automated atomic force microscopy, automated X-ray metrology, cryo dry cleaning, ellipsometry and reflectometry, photothermal AFM-IR, and photomask repair.

We invite you to connect with our experts on the expo floor and at our talks. Our team is excited to answer your questions, discuss your applications, and help you discover how Bruker’s advanced solutions can drive your research. See you there!


Conference Host:
SPIE

Conference Venue:
San Jose McEnery Convention Center | San Jose, CA 

Exhibitor Presentations

Generative adversarial autoencoder for denoising in x-ray critical dimension metrology

Date: 25 February 2026
Time: 5:30 PM - 7:00 PM PST 
Location: Convention Center, Hall 2

Adaptive critical dimension parameter evaluation in x-ray metrology with machine learning

Date: 25 February 2026
Time: 5:30 PM - 7:00 PM PST 
Location: Convention Center, Hall 2

Meet Us at the Show

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Throughout the event, our team will be at the booth showcasing our latest technology and will be available to answer your questions.

Schedule a meeting with us to discuss your unique measurement needs and challenges and find out how Bruker technology can advance your materials research.

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You can email us with more information at productinfo@bruker.com.

 

If you would like to connect with a Bruker representative immediately, here are our regional offices:

Asia: +65 6540 4388
China: +86 10 5833 3000
Europe: +33 172 86 61 00
Japan: +81 3 3523-6361
North America: +1 805-967-1400