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Automated AFMs

Bruker’s automated AFMs provide proven industrial metrology solutions for surface roughness measurement, chemical mechanical planarization (CMP), and etch-depth measurements on the most current technology nodes and wafers. InSight CAP provides our customers with a low-cost automated AFM that is focused on CMP, depth and roughness applications. The InSight AFP is the world’s only metrology tool designed to measure both CMP and etch-depth, offering its users unmatched capabilities and precision. Our InSight 3D-DR system is the world’s most advanced automated 3D-DR tool for defect review. All Bruker automated AFMs combine the repeatability of automation and the flexibility of multiple mode imaging with the precision of high-resolution AFM metrology.

InSight CAP

InSight CAP

Compact Atomic Force Profiling for Production-Based Depth Metrology

Insight AFP tool image v1

InSight AFP

Fully-Automated, Atomic-Level Force Control for CMP Wafers

InSight 3D-DR automated tool for defect review

InSight 3D-DR

The World’s Most Advanced Automated 3D-DR Tool for Defect Review