Micro-XRF on SEM


Upgrading SEMs for Trace Element Analysis

XTrace Mounted on a SEM

QUANTAX Micro-XRF with the XTrace micro-spot X-ray source adds the capabilities of a complete micro-XRF spectrometer to a scanning electron microscope. XTrace fits on a free inclined chamber port of almost any SEM. The user benefits from both the trace element sensitivity and the higher information depth of XRF analysis.

The user friendly Micro-XRF system for SEM

  • Distribution analysis with HyperMap stores complete spectra for every map point for on- and offline analysis
  • Samples can be analyzed with Micro-XRF and EDS without position change
  • Both methods are integrated in the same analytical software suite - ESPRIT 2.0
  • No interference with normal SEM operation, XTrace can stay in its measurement position most of the time.

    A complete micro-XRF spectrometer without the investment

    • Analytical results compare to those of standalone systems
    • Image tiling allows mapping large areas
    • Selectable primary radiation filters to suppress diffraction peaks
    • Uses the SEM motorized stage
    • Allows sample tilt to produce minimum spot sizes.

    Rapid Stage for high-speed elemental mapping

    Rapid Stage is a modular piezo-based stage designed to enable high-speed mapping over large areas. It is mounted on top of an exisiting SEM stage by means of an included stage adaptation for the specific microscope. More info...

    View QUANTAX Micro-XRF on-demand webinars

    Download the XTrace brochure (PDF)

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