Micro-XRF on SEM


Upgrading SEMs for Trace Element Analysis

XTrace Mounted on a SEM

QUANTAX Micro-XRF with the XTrace micro-spot X-ray source adds the capabilities of a complete micro-XRF spectrometer to a scanning electron microscope. XTrace fits on a free inclined chamber port of almost any SEM. The user benefits from both the trace element sensitivity and the higher information depth of XRF analysis.

The user friendly Micro-XRF system for SEM

  • Distribution analysis with HyperMap stores complete spectra for every map point for on- and offline analysis
  • Samples can be analyzed with Micro-XRF and EDS without position change
  • Both methods are integrated in the same analytical software suite - ESPRIT 2.0
  • No interference with normal SEM operation, XTrace can stay in its measurement position most of the time.

    A complete micro-XRF spectrometer without the investment

    • Analytical results compare to those of standalone systems
    • Image tiling allows mapping large areas
    • Selectable primary radiation filters to suppress diffraction peaks
    • Uses the SEM motorized stage
    • Allows sample tilt to produce minimum spot sizes.