Due to the unique capability in positioning the Bruker EDS and EBSD detectors, optimum measurement conditions for both can be achieved. This permits fast and efficient simultaneous EBSD and EDS data acquisition.
Having both methods at hand at the same time is a tremendous benefit for the quality of data produced and conclusions made. Especially in cases of doubt it is very useful to have a second source of information for correct data interpretation. As many analytical steps can be done offline extremely fast, this saves both operator and SEM time.
Simultaneous EBSD and EDS measurement has the following applications:
- Providing phase constituents as input for offline phase identification with Advanced Phase ID
- EDS-based online discrimination of phases producing similar patterns