To maximize the process control for higher quality products by high resolution 2D/3D elemental analysis, Bruker's micro-spot X-ray fluorescence (Micro-XRF) tabletop instruments and electron microscope analyzers provide non-destructive methods and tools for spatially resolved compositional, layer thickness and crystallographic analysis solutions.
The M1 MISTRAL and M4 TORNADO and M4 TORNADOPLUS Micro-XRF instruments provide compositional and coating thickness analysis for those routine and special QA/QC tasks. The M4 TORNADO is also capable of performing spatially resolved element or layer thickness distribution maps to see variations in composition when failure analysis is required.
Scanning and transmission electron microscopes (SEM and TEM) provide the opportunity to use the Bruker QUANTAX system to perform energy dispersive spectrometry (EDS) for inorganic material analysis at the highest of spatial resolutions. Using the XSense wavelength-dispersive spectrometer, challenging materials in the low energy or light element range can be better determined due to its excellent energy resolution. Using the SEM based QUANTAX EBSD (electron backscattered diffraction) system, crystal orientation maps can be acquired to understand the crystallography and phase boundaries, and study deformations in materials. Lastly, the M4 TORNADOPLUS as well as the XTrace combination of Micro-XRF and EDS analysis on the SEM provide the high sensitivity to trace elements of Micro-XRF and the light element performance of EDS.