EDS on the Nanoscale in TEM/STEM and SEM

EDS on the Nanoscale in TEM/STEM and SEM

This webinar took place on June 14th 2017

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In this webinar we highlight the pros and trade-offs for various combinations of EDS instrumentation with different types of electron microscopes for element analysis on the nanoscale.

Element mapping with nm-resolution can be routinely achieved in TEM/STEM. Atomic level element ID of light elements in complex samples is possible using EDS in spherical aberration corrected high brightness STEM.

In case of SEM low voltage or electron transparent samples investigated with high solid angle EDS enable qualitative and quantitative element analysis with nm-resolution. In addition EDS analysis at low beam currents useful for beam sensitive and charging materials will be demonstrated. High solid angle EDS can be provided by multiple detector systems or the annular XFlash® 5060 Flat Quad. The annular detector has the additional advantage of a high take-off angle beneficial in case of high sample topography.

Examples from materials and life science will be used to show acquisition approaches and explain qualitative and quantitative data analysis using ESPRIT software features. Quantification procedures for thin samples based on the Cliff-Lorimer and the Zeta-factor-method will be explained. Furthermore EDS using the annular quad detector in SEM will be discussed.

The webinar will be round off by a 15-minute Q&A session where our experts will answer your questions.

Who should attend?

  • Scientists, engineers, students using EDS on SEM and TEM/STEM
  • Researchers in materials and life science interested in element distribution on the nanoscale


Dr. Meiken Falke
Dr. Meiken Falke
Global Product Manager TEM-EDS, Bruker Nano Analytics
Dr. Igor Nemeth
Application Scientist EDS, Bruker Nano Analytics
Mats Eriksson
Department Manager, Hitachi High-Technologies Europe