Automated AFMs

Bruker’s automated AFMs provide proven industrial metrology solutions for surface roughness measurement, chemical mechanical planarization (CMP), and etch-depth measurements on the most current technology nodes and wafers. InSight CAP provides our customers with a low-cost automated AFM that is focused on CMP, depth and roughness applications. The InSight AFP is the world’s only metrology tool designed to measure both CMP and etch-depth, offering its users unmatched capabilities and precision. Our InSight 3D-DR system is the world’s most advanced automated 3D-DR tool for defect review. All Bruker automated AFMs combine the repeatability of automation and the flexibility of multiple mode imaging with the precision of high-resolution AFM metrology.