software, X-ray diffraction, DIFFRAC.SUITE


LEPTOS R is designed for the analysis of X-ray Reflectivity (XRR) data and off-specular Diffuse Scattering (DS) from thin layered structures. The module is fully integrated in the LEPTOS suite, which incorporates the simultaneous analysis of HRXRD, GISAXS and XRR data. As a part of the LEPTOS suite, the R module inherits all the functionality common for the whole package.


LEPTOS R has been highly rated in several international benchmarks, including the VAMAS project A10. The structure of LEPTOS R is compliant with the newly developed international rfCIF standard for the data format of XRR data.

LEPTOS R Software, XRD
With LEPTOS R diffuse scattering rods and rocking curves can be fitted both as a separate curve and as a consistent set of several curves in any combination of transverse and longitudinal scans.


  • Dynamical Parratt’s formalism to calculate reflectivity from multilayered samples and distorted-wave Born approximation for simulation/fitting of the off-specular diffuse X-ray scattering
  • Diversity of interfacial roughness models for samples with different growth morphology
  • Operator Method for the universal calculation of X-ray scattering parameters from crystalline and amorphous materials, such as: atomic scattering factors, X-ray polarizabilities, etc.
  • Patented Method of EigenWaves (MEW) for the essential acceleration of the fits for the superlattices and repeating multilayers

Sample editor

  • Powerful and flexible sample model editor including the tools for superlattices, linking of layer physical parameters, user-defined layer profiles
  • Extensive, user extendable materials database
  • Virtual Diffractometer tool to account for the instrumental resolution function and footprint effects

Data evaluation

  • Simulation and fitting of the off-specular diffuse X-ray scattering by several vertical and lateral roughness correlation models; both specular and off-specular data can be fitted consistently
  • Simulation, estimation and fitting of data in direct and reciprocal space
  • Fast Fourier Transform for a quick estimation of the layer thicknesses
  • Detailed analysis through fitting using Genetic Algorithm, Simulated Annealing, Simplex or Levenberg-Marquardt fitting routines.
  • Area mapping; automated data evaluation via script interface


  • Saving of results in XML-based project files
  • Several reporting options and customizable export