Fast and Repeatable HB-LED Metrology to Maximize EPI Process Yield and Profitability
TUCSON, Arizona – July 22, 2014 – Bruker today announced that it has been selected for an R&D 100 Award for the LumiMap™ Electroluminescence System. Proprietary features of the system enable LumiMap to quickly deliver accurate electrical and spectral measurements. Lumimap measurements provide feedback on epi wafers in minutes rather than days, reducing scrap events and operating costs for HB-LED manufacturers.
Winners of the R&D 100 Awards are selected by an independent judging panel and the editors of R&D Magazine as the 100 most technologically significant products introduced into the marketplace over the past year. “Bruker is pleased to have again been recognized by the R&D 100 award committee," said Kent Heath, General Manager of Bruker’s Stylus and Optical Metrology Business. “Prior to this year, instrumentation developed at Bruker Nano Surfaces Division facilities has earned eight other R&D 100 Awards, including five for optical metrology and three for atomic force microscopy. We are gratified that with LumiMap we can provide our customers with a unique solution for uncompromised HB-LED epi wafer process metrology that will improve their manufacturing quality and costs.”
“The new technology that is being recognized by the R&D 100 Award includes a proprietary, durable conducting probe, a unique wafer edge contact solution, and advanced I-V curve modeling for wafer level light-emitting junction characterization,” explained Dr. Dong Chen, Principal Scientist at Bruker Nano Surfaces. “These features help LumiMap to deliver the accurate and repeatable forward and reverse IV characteristics, spectral intensity, wavelength and spectral width, as well as quantum efficiency measurements on epi wafers, with a wide range of current settings.”
Key HB-LED manufacturers selected LumiMap as the preferred epi-wafer quality control metrology tool within the first few months of the product’s initial release. LumiMap is proving to be the right answer for the most accurate epi process-control metrology tool for the HB-LED industry.
LumiMap is a value-oriented alternative to conventional, multistep, operator-dependent indium dot methods of epi (made by epitaxial growth) wafer characterization. The system is the first of its kind, fast and non-destructive electrical and spectral measurement system for epi wafer-production process control, and features rapid and non-destructive, no post-measurement chemical cleaning, software-controlled measurement locations, and repeatable electrical and spectral measurement capabilities through forming a temporary LED (light-emitting diode) device on an epi wafer. The results obtained by LumiMap are well correlated with those on the final HB-LED (high brightness LED) device, providing an early warning of process shifts, which in turn reduces the risk of expensive scrap events and improves yields. Simple wafer exchange and intuitive software provides the industry’s easiest to use interface for production quality control, as well as epi process development.
About Bruker Corporation (NASDAQ: BRKR)
Bruker is a leading provider of high-performance scientific instruments and solutions for molecular and materials research, as well as for diagnostics, industrial and applied analysis.
Stephen Hopkins, Marketing Communications
Bruker Nano Surfaces
T: +1 (520) 741-1044 x1022