Insight 3ddr banner image 3

InSight 3D-DR

Bruker’s InSight 3D-DR system is the world’s most advanced automated 3D-DR tool for defect review. By leveraging Bruker’s extensive experience in inline-fab metrology, and combining it with exclusive PeakForce Tapping®, the 3D-DR is capable of imaging nodes 7nm and below and high-speed scanning of greater than 100 images per hour. PeakForce Tapping's instantaneous force control provides enhanced imaging combined with a long probe life and a low cost of ownership, while reducing downtime for probe replacement and recalibration. FinFET process control is one of the 3D-DR’s critical applications, enabling in-die FinFET metrology and 3D defect detection, all at faster speeds than TEM and non-destructive methods.


Contact us

3DDR product image v1

Defect Review with PeakForce Tapping

PeakForce Tapping enables non-destructive defect review with minimal to no sample preparation. This combination leads to rapid time to actionable data.

Insight 3DDR defect review v1
3DDR finfet image v1

Full 3D Capability for FinFET Metrology

The PeakForce Tapping-enabled 3D-DR System provides full 3D capabilities in device active areas for defect characterization and FinFET metrology.