Semiconductor Metrology

Manufacturers Rely on High-Performing 3D Optical Metrology

As semiconductor devices continue to shrink in size, demands on metrology systems for higher performance and increased measurement capabilities are growing. High-quality, low-cost production depends on high-performing metrology systems for QA/QC and for process improvements. This is especially true in companies that produce precision-engineered products such as MEMS, RF filters, microfluidics devices, advanced wafer-level packaging (WLP) for chips, and high-density interconnect (HDI) printed circuit boards (PCB). 

 

The Contour series 3D optical microscopes  are based on Bruker's proprietary white light interferometry (WLI) technology, which is known for its unparalleled metrology performance. Contour systems provide precision, repeatability, and measurement reproducibility, as well as high system throughput. They are the ideal solution for the applications and environments typical in the semiconductor industry that are challenging for other metrology systems.

Critical semiconductor metrology includes measurements of:

  • Film thickness
  • Surface and substrate roughness
  • Critical dimensions (e.g., line width, height, diameter, pitch, and via or trench depth)
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Advanced Packaging

Advanced IC packaging metrology solutions.

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MEMS

Micro-electro-mechanical systems metrology solutions.

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HDI PCB

High-density interconnect printed circuit boards metrology solutions.

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Fully-Integrated Wafer Handler Options for ContourGT-X

Fab-ready, fully-integrated and automated wafer-handling options are now available for the industry-leading and widely adopted ContourGT-X metrology system to enable fast measurement throughput and eliminate the risks of wafer breakage during manual wafer handling.  

For Wafers 200mm and Smaller

WM200 wafer handler

Single FOUP 300mm Wafer Handler

WM300 1 wafer handler

Dual FOUP 300mm Wafer Handler

WM300 2 wafer handler