D8-FABLINE, X-ray metrology solution

The X-ray Metrology Solution

The semiconductor industry is continuously challenged to produce smaller devices and purer compounds, all under a higher throughput. Bruker offers world-leading technology for fast and precise measurements to monitor the process.


X-ray methods provide a non-destructive way to obtain a large set of physical parameters of the semiconductor materials. With a wavelength that matches the crystalline lattice spacings involved, X-rays are the natural probe for any type semiconductor sample.

Monitoring the wafers, up to 300 mm, with about 50 µm spatial resolution is possible, whether for R&D purposes, or for routine production control. Bruker offers tailor-made solutions to fit your experimental needs.