LumiMap Electroluminescence System

HB-LED epitaxial inspection for R&D and production

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Bruker's LumiMap is an electroluminescence metrology system that integrates epi wafer spectral and electrical testing into one, simple, intuitive test environment. It provides immediate data without any wafer preparation for device-level quality control at the epi wafer stage.

The LumiMap uses nondestructive touch probes to control a flow of current through the wafer. This current excites the active layer of gallium nitride causing it to emit light. The LumiMap can then quickly, accurately and repeatably report forward and reverse IV characteristics, spectral intensitywavelength and spectral width measurements.

Download more information - Read the LumiMap Datasheet