Analysis of 3D EBSD data sets using ESPRIT QUBE

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ESPRIT QUBE provides most advanced 3D visualization and post-processing options for EBSD and EDS data.
EQ Phase based subset
Phase based subset showing the Ti-beta grains colored based on the standard IPF triangle

3D EBSD is a destructive tomographic method. It comprises a repeated sectioning and subsequent crystallographic surface characterization by Electron Backscatter Diffraction (EBSD). Typically, an integrated in-situ sectioning technique is applied, such as an SEM based focused ion beam (FIB), to generate accurately spaced serial sections. Alternatively, 3D data sets can be  acquired using conventional metallography techniques and a standard SEM.

Basic voxel datasets, as directly generated by the 3D EBSD technique, are very useful for a number of microstructure characterizations, which are less accessible or incomplete in 2D EBSD. Good examples are grain morphology and crystal plasticity parameters. However, data set sizes in 3D EBSD scale by the additional dimension. Furthermore, 3D EBSD tends to suffer more from drift phenomena than classical 2D EBSD for various reasons.

This webinar will demonstrate how to analyze 3D EBSD data sets with the new ESPRIT QUBE software. You will learn how to get started and how to use its features. The discussion will include topics such as data filtering, subsets, geometrically necessary dislocation densities as well as the synergy that arises from different data set types acquired on the very same microstructure volume. It will be rounded off by a 15-minute Q&A session.


  • Peter Konijnenberg, Senior Scientist, Max-Planck-Institute for Iron Research, Düsseldorf
  • Dr. Laurie Palasse, Application Scientist EBSD, Bruker Nano Analytics, Berlin

Who should attend?

  • FIB/SEM microscopists interested in advanced analytical techniques for material characterization
  • EBSD users interested in 3D EBSD
  • Researchers interested in EBSD studies

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