Stainless steel sample chamber design:
easy sample access
Proven sample chamber design with stationary optics and automated sample head. The large inner diameter of the sample chamber allows for easy sample holder access.
Dry fore pump and turbo pump:
simple and clean vacuum system operation
Fast and reliable evacuation via turbodrag pump and dry fore pump.
Robust, precision stepper motor stage with nine position sample holder:
The sturdy translation stage interfaced to the sample holder allows multiple sample analysis. The high torque motor and solid translation mechanism provide precise sample indexing and years of reliable functionality. Samples are easy to install and remove and the sample holder is nearly effortless to attach in the sample chamber. Gold-coated OFHC copper design of the sample holder ensures uniform temperatures.
Ease of use:
CryoSAS is optimized for operation in the industrial environment. All vacuum and refrigeration devices are controlled by a PLC. Cooling down and starting the measurement is a simple push button operation. The user does NOT have to be a spectroscopy expert or a vacuum expert.
The dedicated CryoSAS software is designed to fulfil the needs of industrial quality control. It is easy to use and can be operated via touch screen. The user simply has to choose the desired analysis method, enter the sample informations and press the start button. CryoSAS will then automatically cool down the samples, start the infrared measurement, evaluate the results and create an analysis report.
Spectral range: 1500 – 280cm-1 optimized for the detection of
- group III and V shallow impurities in single crystal Si according to ASTM/SEMI MF1630. For wedged samples with a thickness of approx.
3mm, the following detection limits can be reached:
- 10ppta Phosphorus
- 30ppta Boron
- substitutional Carbon according to ASTM/SEMI
MF1391. This method requires a Carbon free
FZ reference sample with thickness and surface
properties comparable to the sample specimen.
For a wedged sample with a thickness of approx. 3mm, Carbon
concentrations down to 20ppba can be detected.
Technologies used are protected by one or more of the following patents: US 7034944; DE 19940981