Dektak XTL Automation
Dektak XTL bannerv v1

大尺寸晶片與面板測量



全新的Dektak XTL™探針式輪廓儀優異的精確度、可重復性和再現性廣泛應用於大尺寸晶片及面板制造業。該系統可容納多達350mm x 350mm的樣品,使得傳奇性的Dektak系統可以實現從200mm到300mm的晶片制造。


DektakXTL operator v1
DektakXTL operator v1

 

The Dektak XTL features a small footprint and integrated isolation with interlocking doors, making it ideal for today's demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation enhances manufacturing throughput. Bruker's exclusive Vision64 advanced production interface with optional pattern recognition makes data collection an intuitive and repeatable process, and minimizes operator-to-operator variability.

New software features make the Dektak XTL the most powerful, easiest to use stylus profiler available. The system utilizes Vision64 software that is fully compatible with Bruker’s optical profiler line. The Vision64 software enables unlimited measurement sites, 3D mapping, and highly customized characterization with hundreds of built-in analysis tools.

Also use Vision Microform software to measure shapes such as radius of curvature. Use pattern recognition to minimize operator error and enhance measurement location accuracy. Data collection and 2D and 3D analysis are in one software package with an intuitive flow. Each system comes with a Vision software license which can be installed on a separate PC with Windows 7 OS so data analysis and reports can be created at your desk.

DektakXTLVision64 screenshot

Dektak XTL已經針對持續生產工作時間和最大生產量在工藝開發和質量保證與質量控制應用方面進行了全面優化,將本產品設計為業界最易使用的探針式輪廓儀。