自动化原子力显微镜量测
布鲁克的自动化原子力显微镜（AAFM）为最前沿的技术节点和晶圆制造提供了久经验证的工业化量测方案，包括表面粗糙度分析（Roughness measurement）、化学机械平坦化（CMP）评估到蚀刻深度测定（ Etch-depth measurements ）等关键应用。
Why Choose Atomic Force Profiling
原子力轮廓扫描（Atomic Force Profiling ）是目前监控和优化复杂的CMP及蚀刻工艺步骤，最精确且非破坏性的方法。这项技术可以直接测量芯片的任意有效区域，无需依赖测试结构或理论模型，因此能够敏锐捕捉到任何细微的工艺波动，确保您的生产流程始终处于最优状态。
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Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.