FTIR analysis is highly sensitive and destruction free for detecting shallow impurities in silicon and therefore a widely accepted method of Si quality control. Bruker has decades of experience in this field and offers the most powerful and up to date solutions.
Using the CryoSAS low temperature Si analyzer:
Using an FT-IR spectrometer:
Low temperature NIR photoluminescence for quantification of shallow impurities (e.g. B, P) in single crystal silicon according to ASTM/SEMI MF1389, detection limits less than 1ppta achievable. Available either with liquid He cryostat or with cryogen free pulse tube cryostat.