Semiconductor Solutions Product Line Brochure

Get instant access to the full-length Semiconductor Solutions Product Line Brochure

This brochure highlights the key semiconductor manufacturing challenges addressed by each technology and the specialized systems available for specific process and metrology needs.

Readers can:

• Review Bruker’s major semiconductor solution areas
• Discover application-focused metrology solutions for advanced semiconductor processes
• Compare dedicated instrument platforms within each technology category, with application examples and system descriptions for both high-volume manufacturing and R&D environments
• Use the semiconductor solutions comparison table to match specific process, metrology, or inspection requirements with the appropriate measurement technique and recommended instrument

• Ellipsometry and Reflectometry — Thin film metrology systems for wafer and CD metrology to meet requirements not measurable with conventional equipment
• Automated X-ray Metrology — Systems for high-quality process monitoring, detailed R&D analysis of epilayer films, identification of substrate defects, front-end-of-line control of epi films and high-k dielectrics, and analysis of metal films and wafer-level packaging bumps
• Automated Atomic Force Microscopy — Systems to reliably measure surface roughness, chemical mechanical planarization (CMP), and etch-depth features
• Photomask Repair — Systems to address the critical production issue of controlling pattern defects on high-end photomasks
• Cryo Dry Cleaning — Cryogenic CO₂ process equipment to remove contaminants and residues from wafers and electronic devices
• Surface Metrology — Topographic measurement and mechanical testing solutions for efficient process monitoring and control across the full range of applications