Knowledge Pack: Thin Film Characterization with AFM

Quantitative Mechanical Property Mapping at the Nanoscale with PeakForce QNM

^{RESOURCE TYPE: Application Note [PDF]
LENGTH: 12 pages}

^DESCRIPTION:
This application note explores how PeakForce QNM enables quantitative mapping of mechanical properties such as modulus and adhesion at the nanoscale. It shows how localized mechanical measurements reveal variations in material structure, including cases relevant to heterogeneous thin films and coatings where mechanical behavior influences performance and reliability.

_{READERS WILL LEARN:}

• What nanomechanical mapping is and how it is performed
• Why local mechanical properties matter in thin film and coating evaluation
• How AFM measures modulus and adhesion across heterogeneous materials
• What happens when mechanical contrast reveals variation in film structure

AFM Imaging and Beyond: A Practical Guide to AFM Modes for Materials Research

^{RESOURCE TYPE: Video
LENGTH: ~1 hour 15 minutes}

^{JUMP TO CASE STUDIES: Thin film characterization example is in "Semiconductor Research" segment}

Performing Hyperspectral Mapping with AFM DataCube Nanoelectrical Modes

^{RESOURCE TYPE: Application Note [PDF]
LENGTH: 14 pages}

^DESCRIPTION:
This application note explores how AFM DataCube nanoelectrical modes enable hyperspectral mapping of electrical properties across a sample. It demonstrates how multidimensional datasets provide deeper insight into spatial variation in material properties, including examples relevant to heterogeneous thin film systems where property variation occurs across domains.

_{READERS WILL LEARN:}

• What hyperspectral mapping is in AFM and how it applies to material characterization
• How properties vary spatially across heterogeneous materials, including thin films
• Why multidimensional datasets improve understanding of material variation
• What happens when property behavior is mapped across multiple dimensions

Topography- and Conductivity-Based Thin Film Measurements

^{RESOURCE TYPE: Video (part of "Characterization of Thin Dielectric Films with AFM")
LENGTH: ~15 minutes}

_{PRESENTATION HIGHLIGHTS:}

• [00:00:00] Introduction to the AFM technique

• [00:01:09] Typical applications in dielectrics

• [00:03:54] Electrical properties measurable by AFM

• [00:04:53] Conductive AFM (C-AFM)

• [00:06:29] Tunneling-AFM (TUNA)

• [00:12:34] DataCube TUNA
  

Charge- and Capacitance-Based Thin Film Measurements

^{RESOURCE TYPE: Video (part of "Characterization of Thin Dielectric Films with AFM")
LENGTH: ~12 minutes}

• [00:00:14] Scanning Microwave Impedance Microscopy (sMIM)

• [00:06:47] Kelvin Probe Force Microscopy (KPFM)

• [00:09:15] Extract ε from capacitance measurements between the tip and sample

• [00:10:40] Electrostatic Force Microscopy (EFM)
  

Nanoscale Mapping of Permittivity and Conductivity with Scanning Microwave Impedance Microscopy

^{RESOURCE TYPE: Application Note [PDF]
LENGTH: 10 pages}

^DESCRIPTION:
This application noteexplores how scanning microwave impedance microscopy (SMIM) enables nanoscale mapping of permittivity and conductivity in materials. It shows how subsurface electrical properties and dielectric variations can be resolved, including in layered and thin film structures where properties vary through thickness.

_{READERS WILL LEARN:}

• What permittivity and conductivity mapping reveals in materials and thin films
• How SMIM measures subsurface electrical properties in layered structures
• Why dielectric variation is important for film performance
• What happens when electrical properties are resolved below the surface

Demo: Tunneling AFM on Dimension Icon AFM

^{RESOURCE TYPE: Real-time technical demonstration (part of "Characterization of Thin Dielectric Films with AFM")
LENGTH: ~10 minutes}

• [00:00:11] Instrument setup and sample

• [00:01:30] Software configuration

• [00:02:52] Data acquisition

• [00:04:07] Generating an I-V curve

• [00:05:54] Data images and interpretation
  

Demo: Scanning Microwave Impedance Microscopy on Dimension Icon AFM

^{RESOURCE TYPE: Real-time technical demonstration (part of "Characterization of Thin Dielectric Films with AFM")
LENGTH: ~10 minutes}

_{PRESENTATION HIGHLIGHTS:}

• [00:00:00] Experimental setup

• [00:02:16] Data acquisition

• [00:05:14] Generating capacitance-distance curves
  

Demo: Conductivity mapping with PeakForce TUNA & the Dimension XR AFM

^{RESOURCE TYPE: Real-time technical demonstration (part of "Surface Characterization of Thin Films Symposium")
LENGTH: ~5 minutes}