Bruker’s metrology solutions offer accurate and repeatable PSS height, width and pitch measurements in seconds for improved LED production.

Bruker’s 3D optical microscopes measure patterned sapphire substrates (PSS) for next-generation R&D and production, to maintain device quality. They provide accurate characterization of height, pitch and diameter of PSS features, and measurements take only a few seconds per site.

Extensive automation features enable operator-independent over large numbers of sites so that variations across wafers can be well determined and controlled.

Our 3D microscopes and stylus profilers are also used to characterize the roughness, thickness and shape of the phosphor layers used to create white light from an underlying blue LED. These properties have a large effect on the efficiency of light conversion, and can also affect the color and uniformity of illumination.

Bruker's electron microscope analyzers, such as EDS for SEM and TEM, EBSD, WDS and Micro-XRF, allow the analysis of texture (EBSD) and the element distributions down to ppm with high spatial resolution and also in layered materials (Micro-XRF). Particularly fast analysis, such as needed in quality control or for large sample areas, is possible using a high collection angle device, such as the Bruker XFlash FlatQUAD detector.