Free PDF Download | Full-Length Access

FilmTek 2000 PAR-SE Robotic Brochure [PDF]

Learn more about our fully-automated solution for inline thickness and refractive index metrology for ultrathin films and multilayer stacks

Topic Input value is invalid.

_{* Please fill out the mandatory fields.}

First Name Please enter your first name

Last Name Please enter your last name

Email Please enter your e-mail address

Company/Institution Please enter your Company/Institution

Country or Area Please select your Country

State/Province Please select your State

What best describes your current interest? required

INFO: This Form Sections dropdown won't be visible on publish due to only 1 selectable option.

Phone Number Please enter a valid phone number

ⓘ Used to provide a faster response to requests/questions.

Phone Number Please enter a valid phone number

ⓘ Used to provide a faster response to requests/questions.

Phone Number Please enter a valid phone number

ⓘ Used to provide a faster response to requests/questions.

Phone Number Please enter a valid phone number

ⓘ Used to provide a faster response to requests/questions.

Do you have any questions about this instrument?

Please add me to your email subscription list so I can receive webinar invitations, product announcements and events near me.

Opt-in

By submitting this form I confirm that I would like to be contacted by Bruker. I have taken note of the Bruker Website Privacy Notice and I agree to the Terms of Use of the Bruker website. Please accept the Terms and Conditions

^{Privacy Notice Terms of Use}

Thank you. Your download is ready.

Download Brochure Now

If you have questions about any of our products or services, please contact us.
You can also email us for more information at productinfo@bruker.com.

If you would like to connect with a Bruker representative immediately, contact our regional offices at:

Asia: +65 6540 4388
China: +86 10 5833 3000
Europe: +33 172 86 61 00
Japan: +81 3 3523-6361
North America: +1 805-967-1400

FilmTek 2000 PAR-SE multimodal spectroscopic ellipsometry/multi-angle reflectometry system

FilmTek 2000 PAR-SE Robotic

Multi-angle DUV reflectometry and ellipsometry instrument enables high-resolution, automated inline measurement of patterned thin-film and multilayer film stacks used in complex device structures.

- Film thickness range: 0 Å – 150 µm
- Spectral range: 190 nm – 1700 nm
- Spot size: 50 µm standard

RETURN TO PRODUCT PAGE