Atomic Force Microscopy for Advanced Surface Characterization and Metrology for the Semiconductor Industry
Unlocking Actionable Data and Enhanced Yield with AFM: Techniques and Case Studies for Node and Wafer Processing
Join us for this on-demand webinar on advanced surface characterization and metrology solutions for the semiconductor industry. Learn about the techniques available for in-line process control and the nanoscale characterization of the topography and advanced physical properties of semiconductor materials and devices.
Bruker’s atomic force microscopy (AFM)-based techniques set industry-leading standards, delivering highest accuracy and non-destructive, high-throughput solutions for R&D and fully automated in-line process control.
Webinar Summary
In this webinar, we illustrate how AFM can be applied in modern node and wafer processing steps and front-end/back-end applications to achieve actionable data and enhanced yield. We also provide an overview of high-resolution imaging, profiling, and metrology techniques, illustrated with a variety of case studies.
Topics include:
- Assessment of surface roughness, bonding/hybrid bonding applications, and CMP processes
- Large-scale metrology on the millimeter scale, for full die, field effect, and bevel edges
- Critical dimension (CD) and sidewall metrology of lines, trenches, and vias
- Fully automated characterization of mechanical and electrical properties, carrier profiling, reliability testing, and failure analysis of nanoscale defects on blanket and patterned wafers
- Photothermal NanoIR spectroscopy for chemical identification and mapping on the nanoscale
- AFM-based defect manipulation and repair for photomask
Find out more about the technology featured in this webinar or our other solutions for AFM:
Featured Products and Technology
Speakers
Peter De Wolf, Ph.D., Director of Technology & Application Development
Peter De Wolf is director for AFM technology & application development at Bruker Nano Surfaces, covering all applications related to Scanning Probe Microscopy (SPM). He obtained his PhD from IMEC, Belgium on the development of new SPM methods for 2D carrier profiling in semiconductors and has more than 25 years of experience on SPM. He is the author and co-author of over 30 publications related to electrical characterization using SPM. He also owns several SPM patents, and developed several new SPM modes for electrical characterization.
Sean Hand,
Senior Staff Applications Scientist, BrukerSean Hand is a Senior Staff Applications Scientist with Bruker's Automated AFM group focused on the application of AFM to semiconductor manufacturing. Sean has an M.S. in physics from the University of Vermont where he focused on Atomic Force Microscopy of lipid bilayers for transdermal drug delivery. Sean has over 25 years of experience in AFM for semiconductor manufacturing and has co-authored over 20 papers and owns several patents related to Automated AFM in semiconductor manufacturing.