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Semiconductor & Nanotech

Defects & Contamination

Bruker provides a range of X-ray products for determining crystalline defects and metal contamination.

Defects & Contamination

Bruker (and previously bede and Jordan Valley) were pioneers of digital X-ray Diffraction Imaging (XRDI) in the semiconductor industry to identify killer defects causing wafer breakage, and this has expanded into identifying defects in other substrates which can affect the yield of substrates and devices. Bruker also provides TXRF systems for Si and SiC substrates for the identification of metal contamination on substrates, critical for the production line yield. For off-line inspection, Bruker offers SEM and TEM based solutions including Energy Dispersive X-ray Spectroscopy (EDS), Wavelength Dispersive X-ray Spectroscopy (WDS) and Electron Backscattered Diffraction (EBSD).

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Defects & Contamination

CdTe Monitoring

Using the virtual slits on the QC-RT it is possible to image the sample in modes to visualise scratches, dislocations and other defects, but also to image orientation contrast within the substrate.
Defects & Contamination

Crystalline Defects in Si Substrates

X-ray diffraction imaging (XRDI, also known as X-ray topography) and micro-XRF are used to image and map crystalline defects in otherwise perfect (or near perfect) substrates
Defects & Contamination

Contamination Control

Trace metal contamination is a continually growing concern for semiconductor device fabrication. Contamination is especially critical for advanced technology nodes.
Defects & Contamination

Failure Analysis

Failure analysis is an indispensable part of production control required in manufacturing semiconductor materials. Depending on the material and application, failure analysis can be divided into electrical, chemical, and mechanical tests, to investigate the root cause of a product or material failure.
Semiconductor silicon wafer undergoing probe testing. Selective focus.

Silicon Quality Control

Elemental impurities and disruptions of the crystal lattice have a profound impact on the optical and electrical properties of Silicon. FT-IR and micro-XRF are ideal analytical tools for quality control of such materials.

GaAs Impurity Analysis

Gallium arsenide is a fascinating semiconductor with extensive use in the manufacture of infrared light-emitting diodes, laser diodes, solar cells and other optoelectronics. Learn more about it's quality control.