Analysis of inhomogeneous samples and trace element detection in alloys using QUANTAX Micro-XRF on SEM

Analysis of inhomogeneous samples and trace element detection in alloys using QUANTAX Micro-XRF on SEM

This webinar took place on June 02nd 2016

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Element analysis of samples using scanning electron microscopes (SEM) is widespread in materials science. A SEM provides not only topological information via surface images but also compositional information. In most cases, the microscopist will use energy-dispersive X-ray spectrometers (EDS) to analyze sample radiation created through the microscope’s electron beam.

A complementary method is Micro-XRF on SEM. Here, a focused X-ray photon source provides the capability of a complete Micro-XRF spectrometer to a SEM. This combination extends the analytical capabilities of the SEM to trace element detection at ppm level. The high sensitivity of Micro-XRF for element detection is based on a lower background, the lack of bremsstrahlung and a higher peak to background ratio compared to electron excitation. Both analytical techniques are integrated in Bruker’s analytical software suite ESPRIT 2.

The 30-minute webinar will provide an overview of the method Micro-XRF on SEM and will particularly focus on the XRF analysis of inhomogeneous samples as well as the detection of trace elements. The sensitivity and the improvement of trace element detection using QUANTAX Micro-XRF on SEM and the possibility of analyzing inhomogeneous samples will be demonstrated on alloys.

The webinar will be round off by a 15-minute Q&A session where our experts will answer your questions. 

Why should you attend?

  • Learn more about how Micro-XRF can extend the analytical capabilities of your SEM
  • Gain information on recent developments in this analytical technique
  • Expand your knowledge in the analysis of trace elements and inhomogeneous samples
  • Discuss your own alloy applications with experts


Stephan Boehm
Stephan Boehm
Product Manager micro-XRF / SEM and WDS, Bruker Nano Analytics
Birgit Hansen
Birgit Hansen
Application Scientist EDS & Micro-XRF on SEM, Bruker Nano Analytics