Multi-Channel Detectors for EDS on SEM

Multi-Channel Detectors for EDS on SEM

This webinar took place on October 06th 2010

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Bruker has pioneered the design and production of multi-SDD systems and multi-channel SD detectors for EDS on scanning electron microscopes and microprobes.

In this webinar we want to show the benefits of both types of systems. The webinar will be rounded off with the presentation of application examples from many areas.

During the first part we will talk about multi-detector setups – systems containing two to four detectors on a microscope. Using multiple detectors has a number of advantages including the increase of solid angle, which is especially important when analyzing sensitive samples or, alternatively, for high count rate or throughput applications. Another advantage is the reduction of shadowing, when dealing with samples that have a rough surface.

The second part will discuss multi-channel detectors and their practical applications. Bruker currently offers two four-channel detectors: the conventional XFlash® QUAD 5040 (four 10 mm² SDDs on a single chip) and the annular XFlash® QUAD 5060F (four 15 mm² SDDs), which is positioned between microscope pole piece and sample.

The XFlash® QUAD 5040 provides the best resolution at highest count rates of any EDS detector on the market to date. The XFlash® QUAD 5060F is the detector that offers the largest solid angle in electron microscopy; in this way, it is predestined for the analysis of sensitive samples at low beam currents and accelerating voltages.