Elemental analysis with Energy Dispersive X-ray Spectroscopy (EDS or EDX) in Scanning Electron Microscopy (SEM) can be challenging when dealing with complex and difficult samples. These samples include beam-sensitive materials, life science and biological thin sections, semiconductor devices, battery materials, FIB/TEM lamellae, nanoparticles, and samples with topographic features or heavy surface charge accumulation (i.e. glass and ceramics). For such materials, large area EDS detectors (>100 mm2) are preferred, however their inclined detector geometry and small collection angle can hinder efficient signal collection. This results in noisy EDS maps with poor spectral data quality.
In this webinar, you will learn how the XFlash® FlatQUAD detector can transform your SEM EDS elemental analysis from slow, difficult, and sometimes impossible - to an easy routine analysis. Maximum signal collection is ensured by the detector’s annular four segment SDD design, detector placement under pole-piece, and the high take-off angle. XFlash® FlatQUAD enables unmatched sensitivity, even at low (<3 kV) or high (>15 kV) voltages and ultra-low probe currents (<50 pA). These beam conditions are necessary for “difficult” samples" and are impossible to achieve using conventional single or even multiple large-area EDS detectors with an inclined geometry.
Join us for an informative 30-minute session, where Bruker Nano Analytic’s experts will discuss the capabilities of qualitative and quantitative EDS using the cutting-edge XFlash® FlatQUAD. Discover how this groundbreaking detector can effortlessly handle even the most challenging samples at unparalleled speed (10x – 50x faster) while maintaining unmatched sensitivity, making it is the preferred choice of SEM EDS analysts.
Dr. Purvesh Soni
Application Scientist EDS, Bruker Nano Analytics
Dr. Igor Németh
Application Scientist EDS, Bruker Nano Analytics
Please enter your details below to gain access to the recording of this webinar.