software, X-ray diffraction, DIFFRAC.SUITE

LEPTOS Software

LEPTOS is a comprehensive software suite for the evaluation of  X-ray Reflectometry (XRR), High-Resolution X-ray Diffraction (HRXRD), Grazing-Incidence Small-Angle X-ray Scattering (GISAXS), and Residual Stress (RS) data.

X-ray reflectivity (XRR) provides detailed information on the vertical sample density profile, layer thicknesses, and interface roughness. High-resolution X-ray diffraction (HRXRD) measures the crystallographic structure of the sample. Grazing-incidence Small Angle Scattering (GISAXS) is used for evaluation of nanoparticles and porosity. Residual Stress analysis probes the strain status of bulk samples and polycrystalline coatings.

Along with conventional single-curve scans, LEPTOS enables analysis of high-resolution HRXRD and XRR reciprocal space maps, GISAXS and XRD² Stress frames, area mapping for HRXRD, XRR, and Residual Stress applications. It doesn’t matter whether data have been collected with 0-D, 1-D or 2-D detectors.


The GUI can be customized to accommodate the requirements of both scientific researchers and industrial operators.



  • Joint evaluation of multiple XRR, HRXRD, GISAXS and RS measurements
  • Advanced X-ray scattering theories and numerical methods for estimation, simulation and fitting of data in direct and reciprocal space
  • Naturally integrated processing of the 1- and 2-dimensional data sets measured by point, line and two-dimensional detectors
  • Universal sample model editor for parameterizing any type of thin film and bulk samples
  • Comprehensive and extendable material database covering all 230 crystallographic space groups
  • Area mapping tool for display and evaluation of the measurements performed over large sample areas
  • Advanced sin²ψ method for Residual Stress analysis of 1-D and 2-D data, as well as the multiple (hkl) method of evaluating the stress gradient in polycrystalline coatings
Related Information