The EDS system for the Hitachi FlexSEM1000

QUANTAX 80 is a new EDS system specially designed for the Hitachi FlexSEM1000 Microscope. QUANTAX 80 consists of a XFlash® silicon drift detector (SDD) with the best energy resolution in its field, a small electronics unit and an easy-to-use ESPRIT Compact software.

The system performs qualitative and quantitative analyses of all materials with an element range from boron (5) to californium (98). Besides composition analysis at individual spots on the sample surface, QUANTAX 80 provides powerful line scan and spectral element mapping functions. With the customized detector, the analysis and reporting is completed within seconds.

XFlash 630 H SD detector
ESPRIT Compact software with mapping, report, line scan, and spectrum (from left to right).

Key features

  • High resolution data aquisition
  • Three different analysis modes: Objects, LineScan and Mapping
  • Automatic/interactive element identification starting from boron (5)
  • Accurate element quantification during acquisition
  • Display of quantitative results as atomic, weight or oxide percentage
  • Color-coded concentration distributions (element maps) for any number of elements within an arbitrary field of view including a unique live peak separation and background removal
  • Report generation and print formatting
  • Export of results to MS® Word and Excel
  • Compatible with all QUANTAX 70 and QUANTAX 75 files (reading and processing)
  • Language options: English, German, Spanish, French, Russian, Chinese, Japanese