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ContourGT-X 3D Optical Microscope

Automated, gauge-capable metrology for R&D and production

The fully automated, large-sample ContourGT-X 3D Optical Microscope combines unmatched measurement capabilities with highest vertical resolution over the industry’s largest field of view. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, this flagship of the ContourGT® product line offers the ultimate gage-capable 3D optical microscopy solution.

Only the ContourGT-X incorporates Bruker’s patented tip/tilt head a patented self-calibrating laser reference, integrated pattern recognition, and a host of other proprietary interferometry innovations. No other metrology system provides the non-contact accuracy, throughput, and operator convenience for such a vast range of production metrology and imaging applications.

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ContourGT-I


Robust, Production Gauge-Capable Reliability

Only the ContourGT-X incorporates Bruker’s patented tip/tilt head a patented self-calibrating laser reference, integrated pattern recognition, and a host of other proprietary interferometry innovations. No other metrology system provides the non-contact accuracy, throughput, and operator convenience for such a vast range of production metrology and imaging applications.

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High-Accuracy Stage for High-Resolution Imaging

This motorized X,Y stage equips ContourGT-X with 12-inch encoded movement in the X and Y directions. Sample positioning is made easy with the joystick and software interface controls. An integral part of the ContourGT-X system, this X,Y stage provides automated routines such as multiple-point data collection and stitching capability for large area analysis. The 0.5 micron encoders provide reliable, repeatable automation and sample positioning.



Accurate Metrology Plus High-Fidelity Imaging

ContourGT-K provides the best available lateral resolution in an industrial 3D optical microscope, giving it an enhanced capability to quantify edge variations even on the smallest structures. Contour Elite’s high-fidelity imaging reveals specific surface details that otherwise would be difficult or impossible to see and enables users to segment data based on color or grayscale information to rapidly select areas of interest and collect critical metrology data from these specific regions.

  • Real-time automated measurement optimization
  • Extensive library of filters and analysis options
  • Customized analysis reporting
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Intuitive Analysis and Ease-of-Use

ContourGT's streamlined user interface maximizes user efficiency and simplifies measurements and analyses. ContourGT-X is not only simple to use, it is also the most comprehensive and fully featured 3D surface metrology platform available today.

ContourGT-X makes this all possible through Bruker's Award-winning Vision64® software and a streamlined staging design provide intuitive analysis capabilities and ease of use. ContourGT-X has everything needed for production measure on-demand applications.

ContourGT-X 光学轮廓仪

用于工艺质量监控定标性测试系统

ContourGT-X是实验室开发到批量生产均可适用的高性能仪器。它积累了前十代产品在白光干涉技术上的创新,实现了快速地三维表面测量,从纳米级粗糙度表面的测量到毫米级台阶的测量,垂直分辨率可达亚纳米级。可编程的XYZ控制和独特的扫描头自动控制,使得仪器操作简便易行。配备最新的Vision64软件,具有业界最强的仪器测量和数据分析功能,而其优化设计的用户界面为使用者自行定义自动测量和数据分析提供了极大的便利。

 

 

ContourGT-X是当今业界最先进的白光干涉仪,可用于眼科镜片、医疗器械、高亮度LED、半导体器件、TSV、太阳能电池片、汽车零部件、触摸屏和精密加工零件等各行业,为用户提供最快速、准确地三维非接触式测量。内部激光自校准专利技术可以自动校准因环境或机械不稳定产生的漂移,无需标准块。

 

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