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AFM for Critical Dimension: Metrology of Trenches, Lines and Gratings

Explore the advantages of AFM in quality control feedback on fabrication processes

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Presented by: Senli Guo, Ph.D., Sales Applications Engineer, Bruker, and John Thornton, Engineer Sr. Applications, Bruker (July 26, 2022)

       PRESENTATION HIGHLIGHTS:

  • [00:00:00] Introduction
  • [00:00:56] AFM is the Right Tool for Critical Dimension
  • [00:08:57] PeakForce Tapping & Mode Selection for High Aspect Ratio Structures
  • [00:14:56] Tip Selection for High Aspect Ratio Structures
  • [00:19:26] Automation with Programmed Move & AutoMET
  • [00:30:16] Live Demonstration: How to Measure a Patterned Sample
  • [00:43:32] Q&A

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