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AFM for Critical Dimension: Metrology of Trenches, Lines and Gratings

Explore the advantages of AFM in quality control feedback on fabrication processes

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Presented by: Senli Guo, Ph.D., Sales Applications Engineer, Bruker, and John Thornton, Engineer Sr. Applications, Bruker (July 26, 2022)

_{PRESENTATION HIGHLIGHTS:}

[00:00:00] Introduction
[00:00:56] AFM is the Right Tool for Critical Dimension
[00:08:57] PeakForce Tapping & Mode Selection for High Aspect Ratio Structures
[00:14:56] Tip Selection for High Aspect Ratio Structures
[00:19:26] Automation with Programmed Move & AutoMET
[00:30:16] Live Demonstration: How to Measure a Patterned Sample
[00:43:32] Q&A

Featured Products and Technology

Dimension Icon

Proven highest performance and versatility in an easily tunable AFM platform — now available as IconIR-ready

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AutoMET Software for Dimension Systems

AutoMET Software

Enhanced nanoscale automation for Dimension systems

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PeakForce Tapping Mode - Submolecular-resolution adhesion on iPMMA. 100 nm image. (Sample courtesy of T. Thurn-Albrecht, Martin-Luther-Universitaet Halle-Wittenberg)

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Highest resolution imaging and property mapping

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TR-Mode Teaser Image

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Morphology modes are used to measure the nanoscale 3D structure of a surface.

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Atomic Force Microscope Modes

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AFM modes and the broad capabilities from AFM beyond imaging

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AFM-Materials-BRUKER

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Bruker's materials research atomic force microscopes, powered exclusively by PeakForce Tapping® technology, are helping researchers advance new nanomechanical, nanoelectrical, and nanoelectrochemical research, on the order of three peer-reviewed published articles per day.

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AFMi-EB103 The Definitive AFM Modes Handbook-BRUKER 1

E-Book: The Definitive AFM Modes Handbook

Everything you need to understand, select, and apply AFM techniques in materials research.

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