Breakthrough Metrology Advances of 3D Optical Profilers

Learn about Bruker's advances in 3D optical profiler technology that improve surface measurement of precision machined parts.

Learn about Bruker's advances in 3D optical profiler technology that improve surface measurement of precision machined parts. These features are designed to improve routine operation through ease of use and new advanced metrology capabilities.

Key Topics

  • Achieving sub-nanometer vertical resolution on MEMS and microfluidics, and other large-stepped surfaces
  • Breaking the diffraction limit on patterned surfaces and gratings
  • Protocols for measuring highly-sloped samples >75°
  • Thickness measurements of transparent films (as thin as 100nm)
  • VisionMap software report generation for effective communication of results
  • Data processing with the latest areal s-parameters (ISO25178 compliant)

Speaker

Samuel Lesko

Bruker (USA)

Senior Application Development Manager

Samuel has Ph.D. and engineering degree in material science from the University of Burgundy in France. Since 2000, he built extensive experience in optical profiler, particularly in using white light interferometry applied to MEMS, semiconductor, automotive and aerospace. His vast experience and passion in correlating roughness parameters with the performance of devices or parts has aided countless researchers and engineers in both academic and industrial settings