XRF Solutions

ML plus

Multilayer and Thin Film analysis by XRF

Layer thickness and chemical composition of multilayer samples can be easily determined with X-ray fluorescence analysis (XRF). The layered samples are analyzed directly on the wavelength dispersive X-ray fluorescence spectrometer (WDXRF) S8 TIGER.

MLplus is extending SPECTRAplus for the analysis of single layer and multilayer samples with wavelength dispersive X-ray fluorescence analysis (WDXRF). It allows the direct determination of thickness and composition of layers samples down to several atomic layers (less than 1 nm) and up to the µm- or even mm-range.

MLplus is using a full fundamental parameter approach for all calculations. The determination of thickness and composition in MLplus is based on the standardless calibration of SPECTRAplus, i.e. no specific multilayer standards are required. Nevertheless any available multilayer standard can be used to optimize the results.

MLplus can be used for automatic evaluation after each single measurement once a model has been setup. This makes multilayer analysis available for routine process control e.g. in production of layered glass or coated steel.