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Readers can expect to learn more about the mechanical property measurement capabilities of Bruker's Hysitron TriboIndenter systems when an xProbe™ is equipped and the Intrinsic Thin Film Property Solution (iTF) analysis is applied. This application note focuses on the execution and outcomes of a nanoindentation experiment on an ultra-thin-film sample using this configuration.
KEYWORDS: Elastic Modulus; Mechanical Property Characterization; Quasi-Static Nanoindentation; Thin Film Metrology; Ultra-Thin-Film Metrology