Ultimate Solution for Ultra-Thin-Film Systems

Readers can expect to learn more about the mechanical property measurement capabilities of Bruker's Hysitron TriboIndenter systems when an xProbe™ is equipped and the Intrinsic Thin Film Property Solution (iTF) analysis is applied. This application note focuses on the execution and outcomes of a nanoindentation experiment on an ultra-thin-film sample using this configuration.

_{KEYWORDS: Elastic Modulus; Mechanical Property Characterization; Quasi-Static Nanoindentation; Thin Film Metrology; Ultra-Thin-Film Metrology}