AcuityXR Enhanced Resolution Measurement Mode

The AcuityXR measurement mode enhances the lateral resolution when using PSI (Phase Shifting Interferometry) or VXI measurement modes with the benefit of maintaining an equivalent field of view at higher resolution. It combines unique, patent-pending, hardware and software technology to enable select 3D Optical Surface Profilers to break the optical diffraction limit and deliver lateral resolutions that are traditionally unattainable with conventional interferometry techniques.

Advanced Production Interface

The Advanced Production Interface option significantly expands the Vision64 Production Mode with: (1) Customizable Workflow to add any number of processes prior to measurement sequence with operator prompts and instructions; (2) Data Entry Fields to prompt operators to enter process-specific information; and (3) Recipe Mapping to automatically map and load recipes based on information entered in the data entry fields.

Optical Analysis Package

The Optical Analysis software enables the use of common optical element analyses, including Zernike polynomial fitting.

SureVision Analysis Package

SureVision provides surface statistics on individual, user-defined regions within a dataset. Regions of interest are defined by customizable data templates through easy-to-use use wizards. Selected regional areas (islands) can be individually analyzed or grouped into larger regions, and a wide range of surface and height statistics can be computed for reach region. The result of each region can be analyzed in pass/fail criteria. This software supports full-automation measurements and varying material-type correction tables.

TCP/IP Runtime Control Server

This option allows external control of profilers via Vision's TCP/IP command set.