3D Optical Profilometer


Automated gage-capable metrology for R&D and production



The ContourGT-X 3D Optical Profiler provides the highest performing non-contact surface measurements for laboratory research and production process control. Incorporating ten generations of white light interferometry (WLI) innovation and design, this metrology system delivers the highest vertical resolution over the industry’s largest field of view. Key features include full automation and a production interface, a large motorized XYZ stage, tip/tilt in the head, and an integral air isolation table. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the ContourGT-X offers the ultimate in gage-capable 3D optical accuracy and robustness.

Provides fastest, and easiest nanometer-scale measurements.
production interface
Delivers streamlined process workflows, automated mapping, and load measurement recipes.
laser reference
Ensures best production metrology, repeatability and robustness.



Production-Ready Design and Reliability

ContourGT-X incorporates Bruker’s patented tip/tilt head, a patented self-calibrating laser reference, integrated pattern recognition, and a host of other proprietary interferometry innovations to deliver extremely accurate surface metrology with high throughput. The system’s automation-ready configuration enables rapid optimization in almost any production environment with features ranging from an air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy and PDU, EMO, and vacuum systems for integration to modified vacuum chucks for autoloader end-effector compatibility.

High-Accuracy Stage for Highest Resolution Imaging

The ContourGT-X motorized XY stage provides 12-inch encoded movement in the X and Y directions. The stage supports automated routines, such as multiple-point data collection, as well as stitching capability for large-area analyses. The 0.5 micron encoders provide reliable, repeatable automation and sample positioning. Sample positioning is made easy for operators by intuitive joystick and software interface controls.

Intuitive Surface Measurement and Analysis Software

Bruker's Vision64® Operation and Analysis Software provides the industry’s most functional and streamlined graphical user interface, combining intelligent architecture with intuitive visual workflow and extensive user-defined automation capabilities for fast and comprehensive data collection and analysis. An Advanced Production Interface allows adaptation of ContourGT-X to almost any production environment and automated process. The interface provides tools to customize process workflow, automate mapping, and load measurement recipes.


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