Новый стандарт в зондовой профилометрии

The DektakXT® stylus profiler features a revolutionary design that enables unmatched repeatability of 4Å and up to 40% improved scanning speeds. This major milestone combined with its other breakthroughs, uniquely enable the DektakXT to perform the critical nanometer-level film, step and surface measurements needed to power future advances in the microelectronics, semiconductor, solar, high-brightness LED, medical, scientific and materials science markets.


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Over Forty Years of Profiling Innovation


The Dektak brand boasts the first profiler for thin film measurements, the first microprocessor-based profiler, the first profiler with 3D capability, the first PC-based profiler, and the first automated 300mm profiler. Now, DektakXT continues this legacy of pioneering “firsts” as the first stylus profiler to implement a single-arch design, the first to incorporate a true-color HD optical camera, and the first to harness 64-bit parallel processing architecture to achieve optimal measurement and operating efficiency.

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Speeding Up Collection and Analysis


Utilizing a unique direct-drive scan stage, the DektakXT accelerates measurement scan times by 40% while maintaining industry-leading quality. Vision64, Bruker’s 64-bit parallel processing operation and analysis software, enables faster loading of 3D files and faster applications of filters and multiscan database analyses.

Delivering Repeatable Measurements


Implementing a single-arch structure makes the DektakXT sturdier, which reduces sources of environmental noise. DektakXT’s upgraded “smart electronics” reduce temperature variations and employ modern processors that minimize error-inducing noise, allowing it to be an even more robust system capable of measuring <10nm step heights.

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Perfecting Operation and Analysis


Bruker’s Vision64 software complements DektakXT’s innovative design by providing the most intuitive and streamlined visual user interface. The combination of intelligent architecture and customizable automation capabilities allow for fast and comprehensive data collection and analysis. Whether you’re using a recipe to perform routine analysis on single scans, or applying custom filters settings and calculations, DektakXT’s Data Analyzer displays current data while also revealing other possible analyses.



Making Things Easy


The DektakXT’s self-aligning styli and assembly allows the user to quickly and easily change stylus tip size while eliminating any potential mishaps during the process. Bruker offers the widest range of stylus sizes to accommodate nearly any application need.


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Ensuring High Yield


DektakXT provides the ability to quickly and easily set up and run automated multi-site measurement routines to verify the precise thickness of thin films across the wafer surface with unmatched repeatability. This close monitoring can save valuable time and money by improving yields.