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Solving Challenges in Defect Inspection of Advanced Optics

This webinar will discuss how a white-light interferometry (WLI) optical profiler performs precise, fully automated defect inspection of advanced optical components.

This webinar will discuss how a white-light interferometry (WLI) optical profiler performs precise, fully automated defect inspection of advanced optical components. The noncontact WLI technique uniquely combines subnanometer vertical resolution over mm2 large areas, enabling 100% inspection of high-quality optics through direct measurement of topography.

Presenter Samuel Lesko will explain how customized analysis can easily spot the most minute defects, even in cases of complex surface geometry, and how it automatically outputs critical information of detected defects (size, depth/height, orientation, location) without operator intervention or an etching step. This same measurement also allows accurate characterization of roughness along mid- and short-spatial wavelengths, complying to ISO norm 10110-7/8. The unique information afforded by this technology improves the understanding of the root causes for defects and allows further optimization in the polishing process to meet more stringent specifications.

Optical components such as lenses, mirrors, prisms, and windows undergo tight quality control to deliver optimal optical transfer function. Any scratch, dig, chip pinhole, or other defect will trigger wide-angle scattering of a light beam, reducing the quality of the end product. The number, type, and density of defects, as well as the percentage of defective areas, are assessed through well-defined quality control tests, such as the military standard, MIL-PRF-13830B. Inspection relies on direct or indirect optical methods such as the Schlieren method or differential interference contrast (DIC) to best reveal defects and rank them. However, these techniques are, at best, contour detection-based with often tedious manual operation or need for operator judgment. These techniques also fail to measure quality better than 10-5 (10-µm length, 5-µm equivalent diameter) or report accurate roughness, both of which are required for advanced optics used in gyrolaser navigation systems, high-power laser beams, extreme UV lithography tools, etc.

Overview

Engineers, researchers, QA and QC professionals, optical designers, and executives and managers concerned with inspecting and preventing defects in advanced optical components for a range of industries, including semiconductors and microelectronics, additive manufacturing, automotive, and aerospace.

Speakers

Samuel Lesko

Bruker (USA)

Senior Application Development Manager

Samuel has Ph.D. and engineering degree in material science from the University of Burgundy in France. Since 2000, he built extensive experience in optical profiler, particularly in using white light interferometry applied to MEMS, semiconductor, automotive and aerospace. His vast experience and passion in correlating roughness parameters with the performance of devices or parts has aided countless researchers and engineers in both academic and industrial settings