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XFlash 6-100 oval

The High Collection Angle Windowless EDS System for SEM, FIB-SEM and STEM-in-SEM

This large area, high collection angle, windowless EDS detector with an oval-shaped 100 mm2 SDD is carefully customized for the specific geometry in SEM. The unique shape and state of the art slim-line design allow to optimize the acquisition position achieving a solid angle for X-ray collection of up to 0.4 sr without compromising the SEM performance.

In summary, the XFlash® 6-100 oval offers the following advantages:

  • 100 mm2 area, windowless
  • Solid collection angle up to 0.4 sr, adaptions vary
  • Maximum accelerating voltage on all SEM types: 30 keV
  • Take-off angle of typically 30° … 35°
  • Welded bellows and X-ray-tight shutter (optional)
  • Non-interfering cooling system
  • Automatic detector retraction system
  • Excellent light element and low energy performance
  • All advantages of Bruker’s versatile analysis software

Suggested areas of application for the XFlash® 6-100 oval are:

High-end element analysis by EDS in SEM, FIB-SEM and STEM-in-SEM aiming at:

  • Low kV and beam sensitive samples
  • Light element analysis
  • High spatial resolution
  • Fast data acquisition