This webinar will inform about the detector features, specifics of microscope detector geometries as well as respective data acquisition and analysis. Qualitative and quantitative element mapping for different large collection angle EDS settings will be explained (Fig. 1, 2) and related to results obtained by standard EDS.
The detector has been shown to provide collection angles between 0.4 sr to 0.7 sr at high take-off angles of around 12° on TEM/STEM and collection angles of up to 0.4 sr on SEM. The pole piece to detector geometry is optimized for each specific microscope type in cooperation with the microscope manufacturer. This enables fast and routine element mapping at the nanometer scale without compromising the microscope performance, suitable electron probe quality and specimen preparation provided. In STEM atom column EDS (Fig. 3, ) as well as single atom identification  become possible.
 Direct atomic scale determination of magnetic ion partition in a room temperature multiferroic material L. Keeney et al., Scientific Reports 7, Article number: 1737 (2017), open access
 Individual heteroatom identification with X-ray spectroscopy R. M. Stroud et al., APL 108, 163101 (2016), open access
Dr. Meiken Falke
Global Product Manager TEM-EDS, Bruker Nano Analytics
Senior Product Manager EDS/SEM, Bruker Nano Analytics